For citations:
Kalinichenko A.S., Tychinskaya I.D., Basinyuk V.L. Technological cycle of mechanical processing of silicon-on-sapphire chip substrates. Theory and Practice of Corrosion Protection. 2023;28(3):27-33. (In Russ.) https://doi.org/10.31615/j.corros.prot.2023.109.3-3
Email this article 