Technological cycle of mechanical processing of silicon-on-sapphire chip substrates
https://doi.org/10.31615/j.corros.prot.2023.109.3-3
Abstract
The article presents the results of studies of blade processing using modern modifications of cubic boron nitride (CBN) substrates of thin plates made of sapphire used for the manufacture of “Silicon-on-Sapphire” microcircuits (SOS). These microcircuits are focused on application in space and special equipment due to increased speed and resistance to radioactive exposure. With the right choice of cutting tool geometry, tooling parameters and cutting modes, such processing can be carried out and allows you to obtain a roughness at the level of 20…30 nm.
About the Authors
A. S. Kalinichenko
Belarusian State Technological University
Belarus
Belarus
Alexander S. Kalinichenko, Doctor of Technical Sciences, Director of the Center,
12, Academic str., 220072, Minsk.
I. D. Tychinskaya
Joint Institute of Mechanical Engineering of National Academy of Sciences of Belarus
Belarus
Belarus
Irina D. Tychinskaya, Researcher,
12, Academic str., 220072, Minsk.
V. L. Basinyuk
Joint Institute of Mechanical Engineering of National Academy of Sciences of Belarus
Belarus
Belarus
Vladimir L. Basinyuk, Doctor of Technical Sciences, Professor, Director of the Center,
12, Academic str., 220072, Minsk.
References
1. Microcircuits for space. [Electronic resource]: site. – URL: https://academcity.org/content/mikroshemy-dlya-kosmosa (Accessed 03.03.2023).
2. Prospects and trends in the development of microelectronics [Electronic resource]: site. — URL: https://studopedia.org/12-3700.html (accessed 03.03.2023).
3. Russian microelectronics for space [Electronic resource]: site. – URL: http://odnako.su/hi-tech/pc-hardware/-75030-rossiyskaya-mikroelektronika-dlya-kosmosa-kto-i-chto-proizvodit (accessed 03.03.2023).
4. Features of obtaining tool materials based on diamond and cubic boron nitride [Electronic resource]: site. – URL: https://studopedia.su/9_5609_osobennosti-polucheniya-instrumentalnih-materialov-na-osnove-almaza-i-kubicheskogo-nitrida-bora.html (accessed 03.03.2023).
5. Superhard materials based on diamond and cubic boron nitride for blade tools [Electronic resource]: site. – URL: https://studme.org/73733/tehnika/sverhtverdye_materialy_osnove_almaza_kubicheskogo_nitrida_bora_lezviynogo_instrumenta (accessed 03/02/2023).
6. Sinani, A. B., Dynkin, N. K., Litvinov, L. A., Konevsky, P. V., & Andreev, E. P. (2009). Sapphire hardness in different crystallographic directions. Izvestiya RAN. Series Physical, 73(10), 1463-1465.
Review
For citations:
Kalinichenko A.S., Tychinskaya I.D., Basinyuk V.L. Technological cycle of mechanical processing of silicon-on-sapphire chip substrates. Theory and Practice of Corrosion Protection. 2023;28(3):27-33. (In Russ.) https://doi.org/10.31615/j.corros.prot.2023.109.3-3
Views:
110
Email this article 